Centre for Nanosciences and Nanotechnology - Marcoussis Campus
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Semiconductor and Nanostructures Processing and Analysis > Structural Analyses
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Puce Objectifs

We perform structural (crystalline and morphological) and chemical analyses required to qualify and validate the new materials and the elaboration techniques developped in our laboratory. Resources used are, in particular, X-ray diffraction, transmission electron microscopy, microanalysis and atomic force microscopy. These activities are carried out into the Materials ANAlysis Plateform (PANAM), which is part of Department of Materials of C2N.

Puce Moyens

Puce X-Ray diffraction

Several types of diffraction and reflectometry analysis are proposed at LPN with state-of-the-art X-Ray diffractometers. Crystalline structures, defaults, alloy composition, relatives crystalline orientations can be precisely studied in a non-destructive way for thin films and for assemblies of nanowires or quantum dots.

Puce Multi-configurations diffractometer with rotating anode « Smartlab » RIGAKU

rigaku1 rigaku2

Auto-aligned multi-configurations diffractometer equipped with a 9kW rotating anode for powder diffraction, pole figures, reflectometry, high resolution diffraction, and grazing incidence diffraction (in-plane diffraction of crystallographic planes perpendicular to the surface.

  • 9kW rotating anode source
  • focusing mirror
  • incident beam monochromator Ge(400)x2 and diffracted beam monochromator Ge(220)x2
  • polycapillary lens
  • incident beam collimators 0,15°, 0,5°, 5°
  • diffracted beam collimators 0,114°, 0,5°, 5°
  • scintillation detector

Puce Multi-configurations diffractometer with sealed tube « X'Pert Pro MRD » PANalytical

  • focusing mirror
  • incident beam monochromator Bartels Ge(220)x4 and diffracted beam monochromator Ge(220)x3
  • polycapillary lens
  • collimator 0,18°
  • 1D Pixcel detector
  • Xe detectors

Phone numbers : 0033-(0)1-69-63-61-74 & 0033-(0)1-69-63-61-07

Persons in charge of these equipments : L. Largeau, O. Mauguin

Puce Aberration-corrected Transmission Electron Microscopy

Puce Jeol 2200FS Microscope

Material characterization is required for producing optimally grown functional nanostructures. Transmission Electron Microscopy is a very powerful tool for investigating nanostructures at the atomic scale.

A transmission electron microscope corrected from spherical aberrations allows focusing a very intense electron current as high as 55pA in a beam of 1 Angstrom diameter, which is the size of a unique atomic column. Scattering electrons are collected for the image formation, while X rays produced when the electron beam impacts the structure are collected for a chemical cartography or a spectroscopic investigation of the composition at the atomic scale.

LPN has purchased a Jeol 2200FS Transmission Electron Microscope, equiped with a corrector of spherical aberrations on the STEM probe, and also with an "ultra-high resolution" objective lens. This combination of a TEM column with these analysis tools operating since end of 2008.

STEM image in high resolution annular dark field (HAADF) of a InAsP quantum wire. Each white dot corresponds to an atomic column.
These wires are grown by Vapor Liquid Solid -VLS- technique in an MBE equipment (J.C. Harmand)

Puce C2N is a leading partner of EQUIPEX TEMPOS

C2N hosts and coordinates NANOTEM platform which consists of a TEM / STEM FEI Titan Themis (200kV, XFEG, Cs-corrector probe) with a EDX detector SuperX and a dual-beam (focused ion and electron) FEI Scios.

TEM TEM/STEM Titan Themis 200

- XFEG 80-200 keV
- Chemistem Super-X (EDX)
- Probe Cs-corrector (res : 80 pm)
- S-Twin polar piece 5,4 mm
(res point : 240 pm)
- camera CMOS CETA 4kx4k
- cryo-transfert
- plasma cleaner
- cryo-plunger (hosted by LPS)
TEM Dual-Beam Scios

- NiCol UHR Non immersion FESEM
- Sidewinder Ion Column 500V-30kV
- In-lens detector
- ETD/ICE detectors
- In-situ Easy-Lift manipulator
- Pt/ C GIS

C2N is also an actor of NANOMAX project dedicated to the study of nanocrystal growth in real time with atomic resolution in an environmental microscope (FEI Titan ETEM 300kV installed at Ecole Polytechnique).

Phone numbers : 0033-(0)1-69-63-61-73 & 0033-(0)1-69-63-61-74

Persons in charge of these equipments : G. Patriarche, L. Largeau

Puce Atomic force microscopes

The Atomic Force Microscope and related applications is today an indispensable tool to characterize surfaces at nanometer/atomic scale. The use of the complementarity of these AFM equipments in association with other surface characterization techniques, such as Scanning Electron Microscope, allows the development of efficient technological processes. Basic analyzes of surface characteristics (topography, roughness, film thickness) with monoatomic resolution, or studies using the magnetic or electric modes are used. AFM can also been used as a Nano-tool to modify surface of a sample by local anodic oxydation (LAO). The three AFM are managed by a specific team (3 permanent peoples), which respond to requests and form the users. Two of the three AFM are located in the clean room. One is used in restricted access and attached to the technology center, while the two other are devoted to specific studies in Departments of Materials and Nanoelectronics.


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