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Physique et Technologie des Nanostructures > Nano-fabrication par faisceaux d’ions focalisés
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La structuration d’échantillons à l’aide d’un faisceau d’ions focalisés est complémentaire des techniques de lithographies “classiques ”. La différence essentielle provient du fait que dans ce cas on effectue une structuration directe sans média intermédiaire (résine, métallisation, attaques) du matériau cible sous l’impact d’un faisceau d’ions métalliques (Ga+). La structuration peut s’effectuer au choix soit par injection de dégâts, soit par implantation d’ions, soit par gravure directe. Ceci en contrôlant la dose ionique incidente pour chaque point balayé selon le degré de sensibilité de la cible et de l’effet recherché.

Actuellement le LPN développe possède une expertise qui couvre les trois domaines clés :

  • Développement des sources d’ions basées sur le principe des sources d ’ions à métal liquide
  • Ingéniérie des systèmes d’optique ionique et de l’instrumentation associée
  • Applications de la technologie FIB à la nanofabrication

Ce projet a été retenu par la CEE dans le cadre du programme FP5 comme success story. Vous pouvez aussi vous reporter au site du projet européen.

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STM STM
Figure 1 : Représentation schématique de la machine NanoFIB Figure 2 : Performance de la machine NanoFIB : la largeur des lignes les plus étroites est de 6 nm.
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Puce Members

Contacts

 Faini Giancarlo  (+33) 1 69 63 61 26  
 Mailly Dominique  (+33) 1 69 63 61 27  

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Puce Publications

Publication in journals
  • FIB carving of nanopores into suspended graphene films , A. Morin, D. Lucot, A. Ouerghi, G. Patriarche, E. Bourhis, A. Madouri, C. Ulysse, J. Pelta, L. Auvray, R. Jede, L. Bruchhaus, J. Gierak, Microelectron. Eng. 97, 311 (2012)
  • Local tuning of CoPt nanoparticle size and density with a focused ion beam nanowriter , J. Peneluas, A. Ouerghi, C. Andreazza-Vignolle, J. Gierak, E. Bourhis, P. Andreazza, J. Kiemaier, T. Sauvage, Nanotechnology 20, 425304 (2009)
  • Deposition and FIB direct patterning of nanowires and nanorings into suspended sheets of graphene , D. Lucot, J. Gierak, A. Ouerghi, E. Bourhis, G. Faini, D. Mailly, Microelectron. Eng. 86, 882 (2009)
  • Focused ion beam technology and ultimate applications , J. Gierak, Semicond. Sci. Technol. 24 (4), 43001 (2009)
  • Challenges and opportunities for focused ion beam processing at the nano-scale , J. Gierak, B. Schiedt, D. Lucot, A. Madouri, E. Bourhis, G. Patriarche, C. Ulysse, X. Lafosse, L. Auvray, L. Bruchhaus, R. Jede, Microsc. Microanal. 15 (SUPPL. 2 ), 320 (2009)
  • Exploration of the ultimate patterning potential achievable with focused ion beams , J. Gierak, E. Bourhis, G. Faini, G. Patriarche, A. Madouri, R. Jede, L. Bruchhaus, S. Bauerdick, B. Schiedt, A.-L. Biance, L. Auvray, Ultramicroscopy 109, 457 (2009)
  • Development of a STM compatible ion emitter capable of atomic imaging resolution , D. Martrou, J. Gierak, Microelectron. Eng. 85, 1403 (2008)
  • Extension of focused ion beam technology using highly charged ions from an electron beam ion trap , F. Ullmann, M. Schmidt, F. Grossmann, V. P. Ovsyannikov, J. Gierak, E. Bourhis, G. Zschornack, VDI Berichte 2027, 241 (2008)
  • Sub-5 nm FIB direct patterning of nanodevices , J. Gierak, A. Madouri, A.-L. Biance, E. Bourhis, G. Patriarche, C. Ulysse, D. Lucot, X. Lafosse, L. Auvray, L. Bruchhaus, R. Jede, Microelectron. Eng. 84, 779 (2007)
  • Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer , M. Villarroya, N. Barniol, C. Martin, F. Perez-Murano, J. Esteve, L. Bruchhaus, R. Jede, E. Bourhis, J. Gierak, Microelectron. Eng. 84, 1215 (2007)
  • Production of a helium beam in a focused ion beam machine using an electron beam ion trap , F. Ullmann, F. Grossmann, V. P. Ovsyannikov, J. Gierak, G. Zschornack, Appl. Phys. Lett. 90, 83112 (2007)
  • 2D arrays of CoPt nanocluster assemblies , A. Hannour, L. Bardotti, B. Prevel, E. Bernstein, P. Melinon, A. Perez, J. Gierak, E. Bourhis, D. Mailly, Surface Science 594(1-3), 1 (2005)
  • Functionalizing surfaces with arrays of clusters: role of the defects , P. Melinon, A. Hannour, B. Prevel, L. Bardotti, E. Bernstein, A. Perez, J. Gierak, E. Bourhis, D. Mailly, J. Cryst. Growth Vol 275 Issues 1-2, 317 (2005)
  • Field distribution on metallic and dielectric nanoparticles observed with near-field optical probe , L. Aigouy, M. Mortier, J. Gierak, E. Bourhis, Y. De Wilde, P. Corstjens, J. Tanke, J. Appl. Phys. 97, 104322 (2005)
  • FIB technology applied to the improvement of the crystal quality of GaN and to the fabrication of organised arrays of quantum dots , J. Gierak, E. Bourhis, R. Jede, L. Bruchhaus, B. Beaumont, P. Gibart, Microelectron. Eng. 73, 610 (2004)
  • STM and FIB nano-structuration of surfaces to localise InAs/InP(0 0 1) quantum dots , J. Kapsa, Y. Robach, G. Hollinger, M. Gendry, J. Gierak, D. Mailly, Appl. Surf. Sci. vol 226 Issues 1-3, 31 (2004)
  • An improved gallium liquid metal ion source geometry for nanotechnology , J.-J. Van Es, J. Gierak, R. G. Forbes, V. G. Suvorov, T. Van den Berghe, P. Dubuisson, I. Monnet, A. Septier, Microelectron. Eng. 73, 132 (2004)
  • Exploration of the ultimate patterning potential achievable with high resolution focused ion beams[PDF] , J. Gierak, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prevel, P. Melinon, A. Perez, R. Hyndman, J. P. Jamet, J. Ferre, A. Mougin, C. Chappert, V. Mathet, P. Warin, J. Chapman, Appl. Phys. A vol 80 no 1, 187 (2004)
  • Gold nanoparticle arrays on graphite surfaces , B. Prevel, L. Bardotti, S. Fanget, A. Hannour, P. Melinon, A. Perez, J. Gierak, G. Faini, E. Bourhis, D. Mailly, Appl. Surf. Sci. Vol 226 Issues 1-3, 173 (2004)
  • Magnetic interactions in dot arrays with perpendicular anisotropy , V. Repain, J. P. Jamet, N. Vernier, M. Bauer, J. Ferre, C. Chappert, J. Gierak, D. Mailly, J. Appl. Phys. 95, 2614 (2004)
  • Fabrication and Characterization of Fluorescent Rare-Earth-Doped Glass-Particle-Based Tips for Near-Field Optical Imaging Applications , L. Aigouy, Y. De Wilde, M. Mortier, J. Gierak, E. Bourhis, Appl. Opt. 43, 3829 (2004)
  • Quantum dot system prepared by 2D organization of nanoclusters preformed in the gas phase on functionnalized substrates , A. Perez, L. Bardotti, B. Prevel, M. Treilleux, P. Melinon, J. Gierak, G. Faini, D. Mailly, aucun 4, 76 (2002)
  • Quantum-dot systems prepared by 2D organization of nanoclusters preformed in the gas phase on functionalized substrates , A. Perez, B. Prevel, P. Jensen, M. Treilleux, P. Melinon, J. Gierak, G. Faini, D. Mailly, New Journal of Physics 4, 76 (2002)
  • Modifications of magnetic properties of Pt/Co/Pt thin layers by focused Gallium ion beam irradiation , C. Vieu, J. Gierak, H. Launois, T. Aign, P. Meyer, J. P. Jamet, J. Ferre, C. Chappert, T. Devolder, V. Mathet, H. Bernas, J. Appl. Phys. 91, 3103 (2002)
  • Organizing nanoclusters on functionalized surfaces , L. Bardotti, B. Prevel, P. Jensen, M. Trelleux, M. Treilleux, P. Melinon, A. Perez, J. Gierak, G. Faini, D. Mailly, Appl. Surf. Sci. 191, 205 (2002)
  • Magnetic Nanostructures Patterned by Focused Ion Beam in an ultrathin Pt/Co/Pt film , R. Hyndman, A. Mougin, V. Repain, J. Ferre, J. P. Jamet, J. Gierak, D. Mailly, C. Chappert, V. Mathet, P. Warin, J. Chapman, aucun 2, 175 (2002)
  • Power-law relaxation decay in two-dimensionnal arrays of magnetic dots interacting by long-range dipole-dipole interactions , L. C. Sampaio, R. Hyndman, F. S. De Menezes, J. P. Jamet, P. Meyer, J. Gierak, C. Chappert, V. Mathet, J. Ferre, Phys. Rev. B 64, 65535 (2001)
  • Modification of Co/Pt multilayers by Gallium irradiation Part 1: The effect of structural and magnetic properties , R. Hyndman, P. Warin, J. Gierak, J. Ferre, J. N. Chapman, J. P. Jamet, V. Mathet, C. Chappert, J. Appl. Phys. 90, 3843 (2001)
  • Modification of Co/Pt multilayers by Gallium irradiation Part 2: The effect of patterning using a highly focused ion beam , P. Warin, R. Hyndman, J. Gierak, J. N. Chapman, J. Ferre, J. P. Jamet, V. Mathet, C. Chappert, J. Appl. Phys. 90, 3850 (2001)
  • Nano-fabrication with focused ion beams , J. Gierak, D. Mailly, G. Faini, J.-L. Pelouard, P. Denk, F. Pardo, J.-Y. Marzin, A. Septier, G. Schmid, J. Ferre, R. Hydman, C. Chappert, J. Flicstein, B. Gayral, J.-M. Gerard, Microelectron. Eng. 57-58, 865 (2001)
  • Magnetization Reversal in a Network of Dipolar Coupled Dots , R. Hyndman, P. Meyer, J. Ferre, J. P. Jamet, T. Devolder, V. Mathet, C. Chappert, J. Gierak, aucun 25, 198 (2001)
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Puce Contracts and projects

    Puce ANR PNANO

      DiNaMo : Dispositif Nanoelectrodes-'Molécule Unique'

      Reference contract : ANR PNANO
      C2N leader(s): Ali Madouri
      Main goals : Nanoélectrodes épitaxiées sur substrats isolants pour la réalisation d'un dispositif planaire nanoélectrodes-'molécule unique'. (2005-2008)

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